半導体結晶工学 出浦研究室 早稲田大学理工学術院

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Publication

論文

  1. Investigation of Nondestructive and Noncontact Electrical Characterization of GaN Thin Film on ScAlMgO4 Substrate Using Terahertz Time‐Domain Spectroscopic Ellipsometry with Characteristic Impedance Analytical Model
    Hayato Watanabe, Dingding Wang, Takashi Fujii, Toshiyuki Iwamoto, Tsuguo Fukuda, Momoko Deura, Tsutomu Araki
    physica status solidi (b) 2024
  2. Direct Growth of Nearly Lattice‐Matched InGaN on ScAlMgO4 Substrates Using Radio‐Frequency Plasma‐Assisted Molecular Beam Epitaxy
    Yuta Kubo, Momoko Deura, Yasuhiro Yamada, Takashi Fujii, Tsutomu Araki
    physica status solidi (b) 2024
  3. Suppression of Mixing of Metastable Zincblende Phase in GaN Crystal Grown on ScAlMgO4 Substrates by Radio‐Frequency Plasma‐Assisted Molecular Beam Epitaxy
    Momoko Deura, Yuichi Wada, Takashi Fujii, Tsutomu Araki
    physica status solidi (b) 2024
  4. GaN thickness dependence of GaN/AlN superlattices on face-to-face-annealed sputter-deposited AlN templates
    Momoko Deura, Naoya Mokutani, Yuichi Wada, Hideto Miyake, Tsutomu Araki
    Journal of Applied Physics 2024
  5. Theoretical study on gas‐phase reactions during chemical vapor deposition of TixAl1xN from TiCl4, AlCl3, and NH3
    Noboru Sato, Jun Yamaguchi, Masahiro Koto, Hayato Kubo, Takanori Sugiyama, Takahito Tanibuchi, Momoko Deura, Takeshi Momose, Yukihiro Shimogaki
    International Journal of Chemical Kinetics 2024
  6. Mechanism of SiC formation by Si surface carbonization using CO gas
    Momoko Deura, Yutaka Ohno, Ichiro Yonenaga, Hiroyuki Fukuyama
    Applied Surface Science 159965-159965 2024
  7. Control of Metal‐Rich Growth for GaN/AlN Superlattice Fabrication on Face‐to‐Face‐Annealed Sputter‐Deposited AlN Templates
    Naoya Mokutani, Momoko Deura, Shinichiro Mouri, Kanako Shojiki, Shiyu Xiao, Hideto Miyake, Tsutomu Araki
    physica status solidi (b) 2023
  8. Effect of layer structure of AlN interlayer on the strain in GaN layers during metal-organic vapor phase epitaxy on Si substrates
    Momoko Deura, Takuya Nakahara, Wan Chi Lee, Takeshi Momose, Yoshiaki Nakano, Masakazu Sugiyama, Yukihiro Shimogaki
    Journal of Applied Physics 133(16) 2023
  9. Direct growth of GaN film on ScAlMgO4 substrate by radio-frequency plasma-excited molecular beam epitaxy
    Tsutomu Araki, Seiya Kayamoto, Yuuichi Wada, Yuuya Kuroda, Daiki Nakayama, Naoki Goto, Momoko Deura, Shinichiro Mouri, Takashi Fujii, Tsuguo Fukuda …
    Applied Physics Express 16(2) 2023
  10. Supercritical fluid deposition for conformal Cu film formation on sub-millimeter-scale structures used to fabricate terahertz waveguides
    Yuyuan Huang, Momoko Deura, Yusuke Shimoyama, Yukihiro Shimogaki, Takeshi Momose
    Applied Physics Express 15(7) 075502 2022
  11. Suitability of metallic materials for constructing metal-coated dielectric terahertz waveguides
    Yuyuan Huang, Kuniaki Konishi, Momoko Deura, Yusuke Shimoyama, Junji Yumoto, Makoto Kuwata-Gonokami, Yukihiro Shimogaki, Takeshi Momose
    Journal of Applied Physics 131(10) 105106-105106 2022
  12. On-chip optical interconnection using integrated germanium light emitters and photodetectors
    Kazuki Tani, Tadashi Okumura, Katsuya Oda, Momoko Deura, Tatemi Ido
    Optics Express 29(18) 28021-28021 2021
  13. Development of a model for evaluating propagation loss of metal-coated dielectric terahertz waveguides
    Yuyuan Huang, Kuniaki Konishi, Momoko Deura, Yusuke Shimoyama, Junji Yumoto, Makoto Kuwata-Gonokami, Yukihiro Shimogaki, Takeshi Momose
    Journal of Applied Physics 130(5) 055104-055104 2021
  14. Enhanced room-temperature electroluminescence from a germanium waveguide on a silicon-on-insulator diode with a silicon nitride stressor
    Kazuki Tani, Katsuya Oda, Momoko Deura, Tatemi Ido
    Optics Express 29(3) 3584-3584 2021
  15. Kinetic analysis of face-centered-cubic TiAlN film deposition by chemical vapor deposition
    Momoko Deura, Hiroki Sato, Jun Yamaguchi, Tomoko Hirabaru, Hayato Kubo, Takeshi Momose, Takahito Tanibuchi, Yukihiro Shimogaki
    Materials Science and Engineering B 264 114992-114992 2021
  16. Strain control of GaN grown on Si substrates using an AlGaN interlayer
    Momoko Deura, Takuya Nakahara, Takeshi Momose, Yoshiaki Nakano, Masakazu Sugiyama, Yukihiro Shimogaki
    Journal of Crystal Growth 514 65-69 2019
  17. Insight into physical processes controlling the mechanical properties of the wurtzite group-III nitride family
    I. Yonenaga, M. Deura, Y. Tokumoto, K. Kutsukake, Y. Ohno
    Journal of Crystal Growth 500 23-28 2018
  18. Characterization of femtosecond-laser-induced periodic structures on SiC substrates
    R. Miyagawa, Y. Ohno, M. Deura, I. Yonenaga, O. Eryu
    Japanese Journal of Applied Physics 57 2018
  19. Mechanical properties of cubic-BN(111) bulk single crystal evaluated by nanoindentation
    M. Deura, K. Kutsukake, Y. Ohno, I. Yonenaga, T. Taniguchi
    Physica Status Solidi B 255 1700473/1-1700473/4 2018
  20. Nanoscopic analysis of oxygen segregation at tilt boundaries in silicon ingots using atom probe tomography combined with TEM and ab initio calculations
    Y. Ohno, K. Inoue, K. Fujiwara, K. Kutsukake, M. Deura, I. Yonenaga, N. Ebisawa, Y. Shimizu, K. Inoue, Y. Nagai …
    Journal of Microscopy 268(3) 230-238 2017
  21. Nanoindentation measurements of a highly oriented wurtzite-type boron nitride bulk crystal
    Deura Momoko, Kutsukake Kentaro, Ohno Yutaka, Yonenaga Ichiro, Taniguchi Takashi
    Jpn. J. Appl. Phys. 56(3) 030301/1-030301/4 2017
  22. Impact of local atomic stress on oxygen segregation at tilt boundaries in silicon
    Yutaka Ohno, Kaihei Inoue, Kozo Fujiwara, Kentaro Kutsukake, Momoko Deura, Ichiro Yonenaga, Naoki Ebisawa, Yasuo Shimizu, Koji Inoue, Yasuyoshi Nagai …
    Applied Physics Letters 110(6) 062105-062105 2017
  23. Synthesis of highly-oriented wurtzite-type BN crystal and evaluation of its mechanical properties using nanoindentation
    M. Deura, K. Kutsukake, Y. Ohno, I. Yonenaga, T. Taniguchi
    Japanese Journal of Applied Physics Rapid Communications 56(3) 030301/1-030301/4 2017
  24. Recombination activity of nickel, copper, and oxygen atoms segregating at grain boundaries in mono-like silicon crystals
    Yutaka Ohno, Kentaro Kutsukake, Momoko Deura, Ichiro Yonenaga, Yasuo Shimizu, Naoki Ebisawa, Koji Inoue, Yasuyoshi Nagai, Hideto Yoshida, Seiji Takeda
    Applied Physics Letters 109(14) 142105-142105 2016
  25. Formation of SiC layer by carbonization of Si surface using CO gas
    Momoko Deura, Hiroyuki Fukuyama
    Journal of Crystal Growth 434 77-80 2016
  26. Characterization of silicon ingots: Mono-like versus high-performance multicrystalline
    Kentaro Kutsukake, Momoko Deura, Yutaka Ohno, Ichiro Yonenaga
    Japanese Journal of Applied Physics 54(8S1) 08KD10-08KD10 2015
  27. Elastic properties of indium nitrides grown on sapphire substrates determined by nano-indentation: In comparison with other nitrides
    Ichiro Yonenaga, Yasushi Ohkubo, Momoko Deura, Kentaro Kutsukake, Yuki Tokumoto, Yutaka Ohno, Akihiko Yoshikawa, Xin Qiang Wang
    AIP Advances 5(7) 077131-077131 2015
  28. Nanoscopic mechanism of Cu precipitation at small-angle tilt boundaries in Si
    Yutaka Ohno, Kaihei Inoue, Kentaro Kutsukake, Momoko Deura, Takayuki Ohsawa, Ichiro Yonenaga, Hideto Yoshida, Seiji Takeda, Ryo Taniguchi, Hideki Otubo …
    Physical Review B 91(23) 235315 2015
  29. Three-dimensional evaluation of gettering ability for oxygen atoms at small-angle tilt boundaries in Czochralski-grown silicon crystals
    Yutaka Ohno, Kaihei Inoue, Kozo Fujiwara, Momoko Deura, Kentaro Kutsukake, Ichiro Yonenaga, Yasuo Shimizu, Koji Inoue, Naoki Ebisawa, Yasuyoshi Nagai
    Applied Physics Letters 106(25) 251603 2015
  30. Effect of GaP and GaP/InGaP insertion layers on the structural and optical properties of InP quantum dots grown by metal-organic vapor phase epitaxy
    S. S. Han, A. Higo, W. Yunpeng, M. Deura, M. Sugiyama, Y. Nakano, S. Panyakeow, S. Ratanathammaphan
    Microelectronic Engineering 112 143-148 2013
  31. Highly stable GaN photocatalyst for producing H2 gas from water
    Kazuhiro Ohkawa, Wataru Ohara, Daisuke Uchida, Momoko Deura
    Japanese Journal of Applied Physics 52(8) 08JH04 2013
  32. Investigation of Growth Mechanism for InGaN by Metal-Organic Vapor Phase Epitaxy Using Computational Fluid Simulation
    Momoko Deura, Fumitaka Ichinohe, Yu Arai, Kenichi Shiohama, Akira Hirako, Kazuhiro Ohkawa
    Japanese Journal of Applied Physics 52(8) 08JB13 2013
  33. Highly efficient photochemical HCOOH production from CO2 and water using an inorganic system
    Satoshi Yotsuhashi, Hiroshi Hashiba, Masahiro Deguchi, Yuji Zenitani, Reiko Hinogami, Yuka Yamada, Momoko Deura, Kazuhiro Ohkawa
    AIP Advances 2(4) 042160 2012
  34. High Stability and Efficiency of GaN Photocatalyst for Hydrogen Generation from Water
    Tomoe Hayashi, Momoko Deura, Kazuhiro Ohkawa
    Japanese Journal of Applied Physics 51(11) 112601 2012
  35. The effect of thin GaP insertion layer on InP nanostructure grown by metal-organic vapour phase epitaxys
    Soe Soe Han, Somsak Panyakeow, Somchai Ratanathammaphan, Akio Higo, Wang Yunpeng, Momoko Deura, Masakasu Sugiyama, Yoshiaki Nakano
    Canadian Journal of Chemical Engineering 90(4) 915-918 2012
  36. 740-nm emission from InGaN-based LEDs on c-plane sapphire substrates by MOVPE
    Kazuhiro Ohkawa, Tomomasa Watanabe, Masanori Sakamoto, Akira Iiirako, Momoko Deura
    Journal of Crystal Growth 343(1) 13-16 2012
  37. Origin of electron mobility enhancement in (111)-oriented InGaAs channel metal-insulator-semiconductor field-effect-transistors
    Noriyuki Miyata, Hiroyuki Ishii, Yuji Urabe, Taro Itatani, Tetsuji Yasuda, Hisashi Yamada, Noboru Fukuhara, Masahiko Hata, Momoko Deura, Masakazu Sugiyama …
    Microelectronic Engineering 88(12) 3459-3461 2011
  38. High-Temperature Annealing Effect of Si in Group-V Ambient Prior to Heteroepitaxy of InAs in Metal-Organic Vapor Phase Epitaxy
    Momoko Deura, Yoshiyuki Kondo, Mitsuru Takenaka, Shinichi Takagi, Yukihiro Shimogaki, Yoshiaki Nakano, Masakazu Sugiyama
    Japanese Journal of Applied Physics 50(4) 04DH07 2011
  39. In situ reflectance monitoring for the MOVPE of strain-balanced InGaAs/GaAsP quantum-wells
    Yunpeng Wang, Ryusuke Onitsuka, Momoko Deura, Wen Yu, Masakazu Sugiyama, Yoshiaki Nakano
    Journal of Crystal Growth 312(8) 1364-1369 2010
  40. Twin-free InGaAs thin layer on Si by multi-step growth using micro-channel selective-area MOVPE
    Momoko Deura, Yoshiyuki Kondo, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, Masakazu Sugiyama
    Journal of Crystal Growth 312(8) 1353-1358 2010
  41. Initial growth of InAs on P-terminated Si(111) surfaces to promote uniform lateral growth of InGaAs micro-discs on patterned Si
    Yoshiyuki Kondo, Momoko Deura, Yuki Terada, Takuya Hoshii, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, Masakazu Sugiyama
    Journal of Crystal Growth 312(8) 1348-1352 2010
  42. Dependences of Initial Nucleation on Growth Conditions of InAs on Si by Micro-Channel Selective-Area Metal-Organic Vapor Phase Epitaxy
    Yoshiyuki Kondo, Momoko Deura, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, Masakazu Sugiyama
    Japanese Journal of Applied Physics 49(12) 125601 2010
  43. High Electron Mobility Metal-Insulator-Semiconductor Field-Effect Transistors Fabricated on (111)-Oriented InGaAs Channels
    Hiroyuki Ishii, Noriyuki Miyata, Yuji Urabe, Taro Itatani, Tetsuji Yasuda, Hisashi Yamada, Noboru Fukuhara, Masahiko Hata, Momoko Deura, Masakazu Sugiyama …
    Applied Physics Express 2(12) 121201 2009
  44. Dislocation-Free InGaAs on Si(111) Using Micro-Channel Selective-Area Metalorganic Vapor Phase Epitaxy
    Momoko Deura, Takuya Hoshii, Takahisa Yamamoto, Yuichi Ikuhara, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, Masakazu Sugiyama
    Applied Physics Express 2(1) 011101 2009
  45. In situ passivation of GaAs surface with aluminum oxide with MOVPE
    Yuki Terada, Momoko Deura, Yukihiro Shimogaki, Masakazu Sugiyama, Yoshiaki Nakano
    Journal of Crystal Growth 310(23) 4808-4812 2008
  46. Effect of Ga content on crystal shape in micro-channel selective-area MOVPE of InGaAs on Si
    Momoko Deura, Takuya Hoshii, Mitsuru Takenaka, Shinichi Takagi, Yoshiaki Nakano, Masakazu Sugiyama
    Journal of Crystal Growth 310(23) 4768-4771 2008
  47. Kinetic analysis of surface adsorption layer for InGaAsP-related binary materials using in situ RAS
    Momoko Deura, Yukihiro Shimogaki, Yoshiaki Nakano, Masakazu Sugiyama
    Journal of Crystal Growth 310(23) 4736-4740 2008
  48. Epitaxial lateral overgrowth of InGaAs on SiO2 from (111) Si micro channel areas
    Takuya Hoshii, Momoko Deura, Masakazu Sugiyama, Ryosho Nakane, Satoshi Sugahara, Mitsuru Takenaka, Yoshiaki Nakano, Shinichi Takagi
    Physica Status Solidi C 5(9) 2733-+ 2008
  49. Kinetic analysis of surface adsorption layer in GaAs(001) metalorganic vapor phase epitaxy by in situ reflectance anisotropy spectroscopy
    Momoko Deura, Masakazu Sugiyama, Takayuki Nakano, Yoshiaki Nakano, Yukihiro Shimogaki
    Japanese Journal of Applied Physics 46(10A) 6519-6524 2007
  50. Impact of atomistic surface structure on macroscopic surface reaction rate in MOVPE of GaAs
    Masakazu Sugiyama, Haizheng Song, Momoko Deura, Yoshiaki Nakano, Yukihiro Shimogaki
    Electrochemical and Solid State Letters 10(4) H123-H126 2007